Laboratory high vacuum thermal evaporation coating machine Leadmed
Laboratory high vacuum thermal evaporation coating machine Application: Used for Preparation of conductive thin film, semiconductor thin film, optical thin film;
ZZ4-300G High Vacuum Thermal Evaporation Coating Machine Leadmed
Application:
Laboratory vacuum coating machine
Used for Preparation of conductive thin film, semiconductor thin film, optical thin film;
can be coated for single layer, multiplayer and composite films by control of the switch of evaporation sources;
Technical Performance
Model | ||
Main Chamber size | Ø300x360 mm | |
Vacuum system configuration | Molecular pump, mechanical pump | |
Pressure limited | Better than 5×10-5Pa; leak rate ＜5×10-7PaL/S | |
Recover to vacuum state time | 8×10-4Pa within 30 minutes ( system exposed in the air for short time, do pumping by filled with dry nitrogen) | |
Thermal evaporator&Power supply | 4 evaporator (2ml), can exchange with stranded tungsten wire; 2 sets of power supply controlled by evaporation source : Max. 8V/200A; | |
Gas channel | No. | |
Film thickness monitor | Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |
Sample Platform | Sample size | 12*12cm for once installation, or several smaller pieces. |
revolution | 120 rpm | |
Water-cooling nozzle | 1’’ thread pipe | |
Components | Evaporation, revolution sample holder, light heating system, quartz crystal vibration film thickness monitor, gas circuit, pumping system, control system, installation platform. Suitable for ultra clean room partition installation. | |
Floor Space | ||
Power Supply | ||
Packing | wooden box | |
Others | Can be customized | |