Research high vacuum thermal evaporation PVD coating machine Leadmed
ZZ3-900G High vacuum thermal evaporation coating machine with single chamber size ø900mm and 3 evaporation sources, it can support small lot production;
Research high vacuum thermal evaporation PVD coating machine Leadmed
Application:
It is a high vacuum single chamber multi-evaporation source coating equipment, with the method of thermal evaporation, to make metal X-ray turn into screen thin film preparation.
Widely used in universities, laboraotries, and scientific research institutes and etc.
Highlight
High vacuum degree, easy operation, specially suitable for research and small-lot production.
Technical Performance
Model | ZZ3-900G | |
Main Chamber size | Ø900×1400 mm | |
Vacuum system configuration | Molecular pump, mechanical pump | |
Pressure limited | Better than 5×10-5Pa; leak rate ＜1×10-7PaL/S | |
Recover to vacuum state time | 8×10-4Pa within 30 minutes ( system exposed in the air for short time, do pumping by filled with dry nitrogen) | |
Thermal evaporator&Power supply | 1 Csl beam source furnace ( 800℃): 1.5L; 2 Tll beam source furnace ( 600℃): 20ml; | |
Gas circuit | No. | |
Film thickness monitor | Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |
Sample Platform | Sample size | 40cm×40cm for once installation, or several smaller pieces. |
revolution | auto-rotation 60 rpm | |
Water-cooling nozzle | 1’’ thread pipe | |
Components | Evaporation, revolution sample holder,light heating system, quartz crystal vibration film thickness monitor, gas circuit, pumping system, control system, installation platform. Suitable for ultra clean partition installation. | |
Floor Space | ||
TAG: Research high vacuum thermal evaporation PVD coating machine Leadmed