PLD Pulse laser Deposition dual chamber machine for scientific research Leadmed
This pulse laser deposition machine is for ultra-high vacuum UHV system, mainly used for preparation of oxide thin film, super conducting thin film, semiconductor thin film, ferroelectric film and superhard thin film; It can do coating for single layer film and multilayer film.
PLD Pulse laser Deposition dual chamber machine for scientific research Leadmed
Application
This plant is ultra-high vacuum UHV system, mainly used for preparation of oxide thin film, super conducting thin film, semiconductor thin film, ferroelectric film and superhard thin film;
It can do coating for single layer film and multilayer film.
Technical Performance
Model | ||||
Vacuum chamber size | Ø300 mm sphere | |||
Vacuum system configuration | Deposition chamber | Ion pump+Molecular pump+ mechanical pump+gate valve | ||
Process chamber | Molecular pump+ mechanical pump+gate valve | |||
Pressure limited | Deposition chamber | Better than 5×10-7Pa; leak rate ＜1×10-7PaL/S | ||
Process chamber | Better than 5×10-5Pa | |||
Recover to vacuum state time | Deposition chamber | 5.0×10-6Pa less than 30 minutes ( sample changed finished and then do pumping, vacuum degree is 5.0×10-4Pa) | ||
Process chamber | 5×10-4Pa less than 30 minutes (Do pumping by filled with dry nitrogen when system exposed in the air) | |||
Sample heating platform | Sample size | 1’’ sample, 1pc | ||
revolution | 60 rpm, adjustable | |||
heating | 800℃ | |||
baffle | Electric baffle | |||
Gas channel | Molecular pump+ mechanical pump; 4 sets MFC control 4 gas channels, suction separately | |||
Cooling water nozzle | 1’’ thread pipe | |||
Quasi-molecule laser | laser | Prepared by user | ||
Optical holder | Prepared by user | |||
Electric control system | Touch screen+PLC control system | |||
Components | Deposition chamber, star rotation sample holder, light heating system, gas circuit, pumping system, laser system, light system, control system, installation platform. suitable for ultra clean room installation. | |||
Power Supply | Max. 18Kw/AC380V | |||
Floor Space(mm) | L1600xW1000xH2200mm | |||
TAG: PLD system pulse laser deposition