Laboratory High vacuum metal organic thermal evaporation coating machine Leadmed
Laboratory high vacuum metal organic thermal evaporation coating machine Leadmed Application: semiconductor, solar energy, micro-electronics, shining fields and lab scientific experiments; used for preparation of conductive thin film, semiconductor thin film, optical thin film;
ZZ6-600G Laboratory High vacuum metal organic thermal evaporation coating machine Leadmed
Application
1. semiconductor, solar energy, micro-electronics, shining fields and lab scientific experiments;
2. used for preparation of conductive thin film, semiconductor thin film, optical thin film;
3. can be coated for single layer, multilayer and composite films by control of the switch of evaporation source.
4. Application: experiments for universities, laboratory, scientic research institutes.
Technical Performance
Model | ||
Main Chamber size | Ø500×600 mm | |
Vacuum system configuration | Molecular pump, mechanical pump | |
Pressure limited | Better than 5×10-5Pa; leak rate ＜5×10-10Pam3/S | |
Recover to vacuum state time | 8×10-4Pa within 30 minutes ( system exposed in the air for short time, do pumping by filled with dry nitrogen) | |
Thermal evaporator&Power supply | 2 evaporator (2ml), evaporation current:200A±1A, can exchange with stranded tungsten wire; 4 organic evaporation source; 2 sets of power supply controlled by evaporation source : Max. 8V/200A; | |
Gas channel | No. | |
Film thickness monitor | Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |
Sample Platform | Sample size | Ø80mm for once installation, or several smaller pieces. |
revolution | Heating temperature 600℃, with rotatable crystal oscillator detector, auto-rotation 60 rpm | |
Water-cooling nozzle | 1’’ thread pipe | |
Components | Evaporation revolution sample holder light heating system quartz crystal vibration film thickness monitor gas circuit pumping system control system installation platform Suitable for ultra clean partition installation. | |
Floor Space | ||
Power Supply | ||
Packing | wooden box | |
Others | Can be customized | |
Laboratory High vacuum metal organic thermal evaporation coating machine, this parameters above lists is only for your reference.
if you have different requirement, welcome to contact us for customized!
TAG: vacuum coating machine