High accuracy film thickness monitor for vacuum film coating machine Leadmed

LM508 high accuracy film thickness monitor for film coating machine ApplicationThis monitor is designed with measurement technology of high speed and accurate frequency, computer control technology, excellent soft

LM508 High accuracy film thickness monitor for vacuum film coating machine Leadmed

Application

This monitor is designed with measurement technology of high speed and accurate frequency, computer control technology,

excellent soft programming technology, thus it is a perfect design, manufacturing and assemble monitor.

Applied with modular design, the whole monitor is just a combination of modules, which can realized it the most optimized and cost-efficient.

It is widely used in the optical film coating plant, OLED production line, semiconductor IC production line and other high accuracy film coating plant.

Highlight

High speed and high accuracy measurement. Frequency measurement resolution is 0.002Hz(LM508), measurement speed is 10times/s.
Modular structure. In this monitor, measuring plate and main controller are all designed with modules, it can be increased or decreased according to actual application. Even, measurement module can fulfill mixed assemble of high accurate modules and common accurate modules.
Graphic interface and touch operation, with easy operation and data display directly, also it can provide online help.

Main parameters

Measurement module	items	LM508 common accuracy	LM608 high accuracy	Explanation
	Measuring plate input channel	There are 2 measuring channels on each measuring plate, operate separately		Each monitor can install 4 pcs measuring plates, common plate and high accuracy plate can be mixed.
	Frequency measuring resolution	0.03Hz	0.002Hz	When measuring frequency is 6MHz
	Frequency stability	±0.1Hz	±0.1Hz
	Reference source type	Common quartz crystal	Constant quartz crystal	LM608 need to do preheat at least 15mins to make sure measurement stability.
	Reference source long time stability	±100ppm	±1ppm	Temp. Range: -40~85℃
	Measuring updated speed	10times/S		Single measuring time: 0.1s
	Frequency measurement sampling time	0.1~10S
	Film thickness measuring accuracy	0.1Å	0.01Å	Coating material: Al
	Speed rate measuring accuracy	0.1Å /s	0.01Å /s
	Measuring accuracy	<0.5%	<0.2%	Water cooling probe: temp. Changes <±1℃
	Crystal original frequency	6MHz		Diameter 14mm
Display	Displayer specification	7’’ TFT true-color liquid displayer
	Operation way	4 wires resistance type touch screen
	Remote control way	RS232, RS485
Power supply	AC220V
Consumed power	<50W
Size	335x140x160mm
Storage temp.	-20~50℃
Operational temp.	5~35℃,
Environment temp.	<80%(relative humidity), condensation is not allowed.
Altitude	<2000m

High accuracy film thickness monitor for vacuum film coating machine Leadmed,

Thickness monitor, is a precision mass and film thickness measurement instrument for use in thin film deposition processes and

other quartz crystal microbalance applications. It has proven very accurate and reliable.

TAG: LM508 colorful touch screen film thickness monitor

Film thickness controller

High accuracy film thickness monitor for vacuum film coating machine Leadmed