Laboratory high vacuum electron beam compounded thermal evaporation coating machine Leadmed
ZZS3-600G High vacuum electron beam compounded thermal evaporation coating machine, can be used for preparation for conductive thin film, semiconductor thin film, optical thin film, it is widely used in universities and laboratories;
Laboratory high vacuum electron beam compounded thermal evaporation coating machine Leadmed
Application
1. semiconductor, solar energy, micro-electronics, shining fields and lab scientific experiments;
2. Used for preparation of conductive thin film, semiconductor thin film, optical thin film;
3. can be coated for single layer, multilayer and composite films by control of the switch of evaporation sources.
Technical Performance
Model | ||
Main Chamber size | Ø500x600 mm | |
Vacuum system configuration | Molecular pump, mechanical pump, gate valve | |
Pressure limited | ||
Recover to vacuum state time | 8×10-4Pa within 30 minutes ( system exposed in the air for short time, do pumping by filled with dry nitrogen) | |
Thermal evaporator&Power supply | 2 metal evaporator (2ml), evaporation current:200A±1A, can exchange with stranded tungsten wire; electronic beam evaporation source: E type electronic gun, 8Kw4-8 hole, 20ml; 2 sets of power supply controlled by evaporation source : Max. 8V/200A; | |
Gas channel | 2 channel gases, Ar, N2 | |
Film thickness monitor | Single detector; Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |
Sample Platform | Sample size | Ø100cm for once installation, or several smaller pieces. |
revolution | Heating temperature 600℃, with rotatable crystal oscillator detector, auto-rotation 60 rpm | |
Water-cooling nozzle | 1’’ thread pipe | |
Components | Evaporation, revolution sample holder,light heating system, electronic gun and its power supply, quartz crystal vibration film thickness monitor, gas circuit, pumping system, control system, installation platform. Suitable for ultra clean partition installation. | |
Floor Space | ||
Power Supply | ||
Packing | wooden box | |
Others | Can be customized | |
TAG: E beam compounded thermal evaporation film coating