Advanced UHV ultra high vacuum multifunctional 3 vacuum chamber thermal evaporation coating machine Leadmed
ZZS3-300C Advanced UHV ultra high vacuum multifunctional 3 vacuum chamber thermal evaporation coating machine Leadmed is composed by reservation chamber, thermal evaporation coating chamber, electron beam coating chamber, supporting vacuum pumping system, film thickness monitor and water cooling recycling system, it is focus for ultra high vacuum system;
Advanced UHV ultra high vacuum multifunctional 3 vacuum chamber thermal evaporation coating machine Leadmed
Introduction
This plant is composed by :
1 set reservation chamber,
1 set thermal evaporation coating chamber,
1 set electron beam coating chamber
1 set supporting vacuum pumping system ( including 1 set mechanical pump, 1 set molecular pump and 2 sets ion pump)
1 set film thickness monitor
1 set water cooling recycling system ( used for water cooling of molecular pump, thermal evaporation beam source)
and supported with relevant substrate heating system, which is used for substrate heating or sample annealing in the reserved process chamber and coating chamber.
Characteristics
The whole plant is starlike structure, easy for operation, short distance for sample transportation, high repeatability and less cross contamination.
It works very stable and convenient for comparison of experiments, with functions of multi-source evaporation coating film, real-time film thickness monitoring and replacement of in situ film during the process of coating.
It can fulfill multi-source co-evaporation and doping experiments.
Expandability can connect with glovebox, and will achieve ability of treatment of oxide plasma and Ar. Plasma in the future, including plasma corrosion and in situ luminescence spectrum.
Technical Performance
Model | ZZS3-300C | |
Vacuum chamber | Coating chamber | SUS304LSS, Ø300×H300mm; |
Reservation chamber | SUS304LSS, Ø300mm; | |
Fast sample injection chamber | SUS316LSS, Ø100mm front door | |
Vacuum system | Coating chamber | Molecular pump+ gate valve |
Reservation chamber | Molecular pump+ mechanical pump+gate valve | |
Fast sample injection chamber | mechanical pump+gate valve | |
Pressure limited | Coating chamber | Better than 1.0×10-6Pa; leak rate ＜1×10-7PaL/S |
Reservation chamber | Better than 5.0×10-5Pa; leak rate ＜1×10-7PaL/S | |
Fast sample injection chamber | Better than 5.0×10-4Pa | |
Sample heating platform (coating chamber) | Sample size | 20×20mm, 6pcs |
revolution | XYZ holder can be adjusted and auto-rotated | |
heating | 700℃ | |
baffle | Electric baffle | |
Sample heating platform (reservation chamber) | Sample size | 20×20mm, 6pcs |
revolution | XYZ holder can be adjusted and auto-rotated | |
heating | 700℃, used for annealing or exhausting | |
baffle | no | |
Fast sample injection chamber | Space for one sample, can be put one sample by glove box; with 1 set of suction adjustable valve, it can do plasma cleaning on sample surface | |
Heat evaporation source | Beam source furnace | Design with 10 interfaces, and installed 6 beam source furnaces |
power supply | 6 sets | |
Film thickness monitor | 2sets; Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |
Magnetic sample transportation pole | 2sets; can make mutual delivery between coating chamber, reservation chamber, fast sample injection chamber and glovebox. | |
Cooling water nozzle | 1’’ thread pipe | |
Reserved way of sample injection chamber | glow plasma cleaning | |
Glovebox system | double position glovebox | |
Electric control system | Touch screen+PLC control system | |
Components | Evaporation chamber, revolution sample holder, light heating system, quartz crystal vibration film thickness monitor, gas circuit, pumping system, control system, installation platform. suitable for ultra clean room installation. | |
Power Supply | ||
Floor Space(mm) | ||
Packing | Wooden box | |
TAG: multichamber coating machine Advanced UHV ultra high vacuum multifunctional 3 vacuum chamber thermal evaporation coating machine Leadmed