High vacuum 3 sputtering targets 2 vacuum chambers magnetron sputtering coating machine Leadmed
JP32-450G High vacuum three targets ( two chambers) magnetron sputtering coating machine, with 3 targets 2 chambers single sample co-sputtering structure, it can control 3 kinds of material of their technical conditions including components, temperature, environment and etc; It can do preparation of single layer, multilayer, alloy metal film and other kinds of film that can be generated by easily adjustment of their components.
High vacuum 3 sputtering targets 2 vacuum chambers magnetron sputtering coating machine Leadmed
Application:
With 3 sputtering targets 2 vacuum chambers single sample co-sputtering structure, it can control 3 kinds of material of their technical conditions including components, temperature, environment and etc;
It can do preparation of single layer, multilayer, alloy metal film and other kinds of film that can be generated by easily adjustment of their components.
Widely used in the laboratory, experiment, scientic research institutes, and etc;
Technical Performance
Model | ||||
Main sputtering chamber size | Ø450D | |||
Process chamber | Ø150×L300 mm | |||
Vacuum system configuration | Main sputtering chamber | Molecular pump+ mechanical pump+gate valve | ||
Process chamber | mechanical pump | |||
Pressure limited | Main sputtering chamber | Better than 5×10-5Pa; leak rate <1×10-7PaL/S | ||
Process chamber | Better than 5×10-1Pa | |||
Recover to vacuum state time | Main sputtering chamber | 2.0×10-4Pa within 30 minutes ( sample changed finished and vacuum degree is 5.0×10-1Pa, then do pumping) | ||
Process chamber | 5×10-1Pa within 10 minutes ( when system begins do pumping ) | |||
Magnetron sputtering components | 3’’ targets; 1 strong target, 2 standard targets; compatible of DC, MF and RF; indirect water cooling connection; | |||
DC500W, 2 sets; 1 sets RF500W( auto-match) | ||||
Sample heating platform | Sample size | Ø120mm | ||
revolution | Z lifting +Z rotation, Z spindle: 60 rpm | |||
heating | Max. 500℃ | |||
Negative bias | NO | |||
baffle | Electric baffle | |||
Gas circuit | Molecular pump+ mechanical pump, 3 way gas, Ar, N2, O2 | |||
Cooling water nozzle | 1’’ thread pipe | |||
Film thickness monitor | Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | |||
Optional components | Sample injection chamber | no | ||
Sample Injection chamber anti-sputtering target | With Plasma cleaning function | |||
Sample Injection chamber annealing furnace | no | |||
Electric control system | Touch screen+PLC control system | |||
Components | Sputtering chamber, revolution sample holder, light heating system, quartz crystal vibration film thickness monitor, gas circuit, pumping system, control system, installation platform. suitable for ultra clean room installation. | |||
Power Supply | Max. 5Kw/AC380V | |||
Floor Space(mm) | ||||
Packing | Wooden box |
TAG:   High vacuum 3 sputtering targets 2 vacuum chambers magnetron sputtering coating machine Leadmed