Laboratory small vacuum magnetron sputtering coating machine (Pt, Au) Leadmed
JP1-200 Magnetron sputtering coating machine (Pt, Au) single layer Application Used for development and research of precious metal thin film such as Pt, Au etc. It is with single target sputtering coating method; Up-turning structure, make operation more easy;
Laboratory small vacuum magnetron sputtering coating machine (Pt, Au) Leadmed
Application
Used for development and research of precious metal thin film such as Pt, Au etc.
It is with single target sputtering coating method;
Up-turning structure, make operation more easy;
Technical Performance
Model | JP1-200 | |
Vacuum chamber size | Ø200×H300 mm | |
Vacuum system configuration | mechanical pump | |
Pressure limited | Better than 5×10-1Pa; leak rate ＜5×10-6PaL/S | |
Recover to vacuum state time | 5×100Pa within 10 minutes ( Do pumping by filled with dry nitrogen when system exposed in the air) | |
Magnetron sputtering components | 3’’ targets; 1 magnetron target; sputtering power supply: 1 set DC500W; manual baffle | |
Sample heating platform | Sample size | Ø75mm |
revolution | 60 rpm | |
heating | no | |
baffle | no | |
Gas circuit | Molecular pump+ mechanical pump; 1way gas, Ar | |
Cooling water nozzle | 1’’ thread pipe | |
Film thickness monitor | no | |
Optional components | Sample injection chamber | no |
Sample Injection chamber anti-sputtering target | no | |
Sample Injection chamber annealing furnace | no | |
revolution | 60 rpm | |
Control system | Touch screen+PLC control system | |
Components | Sputtering chamber, revolution sample holder,light heating system, , gas circuit, pumping system, control system, installation platform. suitable for ultra clean partition installation. | |
Power Supply | ||
Floor Space(mm) | ||
Packing | Wooden box | |
TAG: Laboratory small vacuum magnetron sputtering coating machine (Pt, Au) Leadmed