Research high vacuum magnetron sputtering coating machine Leadmed
JP2-300G High vacuum magnetron sputtering coating machine: With 2 targets 1 sample co-sputtering structure, widely used for composition of many kinds of new material; it can control 3 kinds of material of their conditions including components, temperature, environment and etc, at the same time, it can do preparation of single substance layer, composed layer, single layer, multilayer, ITO thin film, medium film and etc.
Research high vacuum magnetron sputtering coating machine Leadmed
Application:
With 2 sputtering targets 1 sample co-sputtering structure, widely used for composition of many kinds of new material,
it can control 3 kinds of material of their conditions including components, temperature, environment and etc,
at the same time, it can do preparation of single substance layer, composed layer, single layer, multilayer, ITO thin film, medium film and etc.
Technical Performance
Model | |||
Vacuum chamber size | Ø300xH300 mm | ||
Vacuum system configuration | Molecular pump+ mechanical pump | ||
Pressure limited | Better than 5×10-3Pa; leak rate ＜5×10-9Pam3/S | ||
Recover to vacuum state time | 5×10-4Pa less than 30 minutes ( Do pumping by filled with dry nitrogen when system exposed in the air) | ||
Magnetron sputtering components | Sputtering target ( negative) | 2’’ targets; 1 strong magnetron target, 1 standard target; compatible of DC and RF; indirect water cooling connection; can expand to 3 targets; | |
Sputtering power supply | DC500W, 1 set; 1 set RE500W( auto-match) | ||
Sample heating platform | Sample size | Ø100mm | |
revolution | 60 rpm | ||
heating | Max. 500℃ | ||
baffle | Electric baffle | ||
Gas circuit | Molecular pump+ mechanical pump; 2 way gas, Ar and O2 | ||
Cooling water nozzle | 1’’ thread pipe | ||
Film thickness monitor | Frequency resolution 0.03Hz; Speed resolution0.1A/S; Film thickness resolution 0.1A; | ||
Electric control system | Touch screen+PLC control system | ||
Components | Sputtering chamber, revolution sample holder,light heating system, gas circuit, pumping system, control system, installation platform. suitable for ultra clean room installation. | ||
Power Supply | |||
Floor Space(mm) | L700xW800xH1600mm | ||
Packing | Wooden box | ||
TAG: Research high vacuum magnetron sputtering coating machine Leadmed