PLD Pulse Laser Deposition coating machine for university and laboratory Leadmed
PLD1-450G Pulse Laser Deposition Machine (PLD), this equipment is mainly used for preparation of oxide thin film, superconducting thin film, semiconductor thin film, ferroelectric film and superhard thin film; It can do film coating for single layer film and multilayer film.
PLD Pulse Laser Deposition coating machine for university and laboratory Leadmed
Application
This equipment is mainly used for preparation of oxide thin film, superconducting thin film, semiconductor thin film, ferroelectric film and superhard thin film;
It can do film coating for single layer film and multilayer film.
Technical Performance
Model | ||
vacuum chamber size | 304SS, Ø350 mm, vertical top cover | |
Vacuum system configuration | Molecular pump+ mechanical pump+gate valve; | |
Pressure limited | Better than 5.0x10-5Pa; leak rate ≤1x10-7PaL/s | |
Recover to vacuum state time | 5x10-4Pa less than 30 minutes (Do pumping by filled with dry nitrogen when system exposed in the air) | |
Sample holder (star rotation) | Install 4pcs targets at the same time; size Ф50mm; only one target come out | |
Sample heating platform | Sample size | 6’’ sample, 1pc; |
revolution | 60 rpm | |
heating | 800℃ | |
baffle | Electric baffle | |
Gas circuit | 1 sets MFC control 1 way gas single suction: O2 | |
Cooling water nozzle | 1’’ thread pipe | |
Quasi- molecule laser | laser | Prepared by user |
Optical holder | Prepared by user | |
Control system | Touch screen+PLC control system | |
Components | Laser, deposition chamber, star rotation sample holder, light heating system, gas circuit, pumping system, laser system, light system, control system, installation platform. suitable for ultra clean room installation. | |
Power Supply | Max. 15Kw/AC380V | |
Floor Space(mm) | ||
Packing | Wooden box | |
TAG: PLD Pulse Laser Deposition coating machine for university and laboratory